SUSS MicroTec Launched GreenTec Solutions Product Line
The company has officially entered the wafer-cleaning market with its new GT200 system for semiconductor manufacturing.
Updated on Oct. 13, 2026 in Semiconductors
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SUSS MicroTec SE has expanded its portfolio by launching the GreenTec Solutions product line and the new GT200 wafer-cleaning system. This move marks the company entry into the wafer-level cleaning sector, targeting applications such as MEMS, RF, Power Device, and CMOS.
Why it matters
By leveraging its existing process expertise, SUSS aims to capture share in a substantial market while offering technology designed to reduce hazardous acid use and chemical consumption. The expansion positions the firm to address growing technical demands in semiconductor production.
The GT200 system supports 200 mm process development and production by combining batch soaking with single-wafer handling. It utilizes TurbulenStrip and CrustBuster technologies alongside in-situ UV to remove resist and organic residues.
The players
SUSS MicroTec SE
The company is a leading manufacturer of equipment and process solutions for the semiconductor and micro-systems industries.
The details
The new hardware is specifically engineered to handle complex cleaning tasks by eliminating hazardous acids through specialized removal technologies. Its design caters to high-volume process requirements for various semiconductor application types.
Timeline
2027 marks the planned release for the 300 mm high-volume manufacturing platform.
2028 is the scheduled launch year for the 200 mm high-volume manufacturing platform.
The Tech Race
This product line extends the capabilities of traditional wafer-level cleaning by replacing manual or hazardous chemical-heavy processes with automated UV and batch-soaking technologies. It positions SUSS MicroTec to compete more aggressively in the specialized equipment market for legacy and emerging semiconductor devices.
Manufacturers utilizing these systems can expect streamlined production workflows and improved safety through the reduction of hazardous chemicals. This shift may ultimately facilitate more efficient device fabrication for end-user technologies like power devices and CMOS chips.
The takeaway
The move into the cleaning market signals a strategic effort to consolidate equipment offerings across the full semiconductor manufacturing cycle. Companies focusing on specialized cleaning tech are increasingly prioritizing sustainable processes to meet modern environmental and production standards.
Further reading
For more information on current industry trends, visit Semiconductors.
Source note: This article includes information reported by DQ.
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