Albany NanoTech Installs Advanced Chip Lithography Tool
The new ASML high-NA EUV machine enhances research capabilities at the Albany NanoTech Complex facility.
Updated on Oct. 21, 2026 in Semiconductors
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NY Creates has installed an ASML high-NA EUV lithography tool as part of a $10 billion semiconductor research collaboration. The project also included a 50,000-square-foot expansion of the cleanroom space at the Albany NanoTech Complex.
Why it matters
This initiative aims to establish New York as a premier hub for semiconductor research and development. By providing partners with early access to advanced tools, the state intends to attract manufacturing investment.
The facility now features an ASML high-NA EUV lithography tool supported by a 50,000-square-foot cleanroom expansion. This brings the total cleanroom footprint at the Albany NanoTech Complex to over 200,000 square feet.
The players
NY Creates
This nonprofit organization manages the Albany NanoTech Complex and leads semiconductor research and development initiatives in New York.
ASML
This Dutch company is a leading manufacturer of advanced lithography machines used in the production of semiconductor chips.
IBM
A global technology company, IBM is a core partner in the semiconductor research collaboration at the Albany facility.
Micron Technology
Micron Technology is a major producer of computer memory and data storage that collaborates on chip research.
Tokyo Electron
Tokyo Electron is a global manufacturer of semiconductor production equipment that partners with researchers in Albany.
The details
Industry partners including IBM, Micron Technology, Applied Materials, and Tokyo Electron are using the facility to iterate on chip innovations. The collaboration, which secured CHIPS Act funding, allows vendors to test designs before moving to full-scale manufacturing.
Timeline
The R&D collaboration between NY Creates and semiconductor vendors launched in December 2023.
First wafers are expected to be produced by the tool in 2026.
The lithography tool is expected to be fully ready for development projects in early 2027.
The Tech Race
This installation aligns with the federal CHIPS Act to bolster domestic semiconductor infrastructure against global competition. It replaces reliance on older legacy manufacturing methods by providing R&D partners with the most advanced lithography technology available.
While the technology is currently used for research, it accelerates the development of more efficient chips for consumer electronics. Local residents may see indirect economic benefits through the expansion of the regional tech workforce and manufacturing ecosystem.
The takeaway
The move positions the Albany NanoTech Complex as a critical node in the global chip development pipeline. It underscores how public-private partnerships can lower the barrier to entry for firms testing next-generation hardware.
Further reading
Learn more about the local industry at the Albany Semiconductors section.
Source note: This article includes information reported by Globalspec.
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