PI Launches A-323 Planar Air Bearing Scanner
The U.S.-built A-323 adds a split-beam cross-axis design to the company's A-322 planar scanner platform.
Updated on Nov. 5, 2026 in Robotics
PI (Physik Instrumente) L.P. has announced the A-323 planar air bearing scanner, designed and manufactured in the USA. The system builds on the company's A-322 planar scanner.
Why it matters
Rapid moves can introduce vibration that delays measurement, and small yaw deviations produce larger linear errors at wafer edges. The A-323's architecture targets these precision limits in high-accuracy positioning applications.
The A-323 specifies 500 × 500 mm of XY travel, speeds up to 2 m/s, 2 g acceleration and 0.1 µm accuracy, with pitch performance of 10 µrad and yaw of 2 µrad. Independent verification of these manufacturer figures is not included in the source.
The players
PI (Physik Instrumente) L.P.
PI (Physik Instrumente) L.P. is a precision motion control and positioning company headquartered in the United States that designs and manufactures motion systems for industrial and research applications.
The details
The A-323 uses a split-beam cross-axis design that places the payload lower and closer to the motor force plane, redirecting motor reaction forces into the machine frame rather than the granite base. It also accommodates application-specific motion modules in a central pocket and includes integrated cable tracks, pneumatic routing and cooling provisions.
Timeline
November 5, 2026: PI announces the A-323 planar air bearing scanner.
The Tech Race
The A-323 extends PI's earlier A-322 planar scanner, adding a split-beam cross-axis design aimed at reducing vibration and yaw-induced error in high-precision positioning. It positions PI's U.S.-manufactured planar platform as a successor to its own prior generation rather than a departure from it.
For engineers and manufacturers working on wafer inspection or precision assembly, the A-323's specified accuracy and angular performance could bear on equipment selection. The source does not indicate pricing or availability, so buyers would need to contact PI directly for those details.
The takeaway
Precision positioning gains often come from structural design as much as from motors and sensors. The A-323's split-beam approach shows how routing motor forces away from the base can reduce the error sources that limit measurement speed.
Further reading
Explore more in Robotics for context on precision motion platforms like this one.
